Equipment: Quorum Q150T ES
Technique: Sputter coating
Description:
The Q150T system is a versatile and fully automated high resolution sputter coater and high vacuum carbon evaporator for preparing specimens for examination by SEM, TEM and many thin-film applications. Available targets include Chromium, Gold or Iridium. Evaporation of carbon rods or cords is also available.
Specifications:
Sputter Coater
- Target: 54 mm dia x 0.2 mm thick (chromium fitted as standard)
- Specimen stage: 60 mm dia. Rotating stage.
- Deposition current: 0-150 mA
- Deposition rate: 0-20 nm/minute
- Sputter timer: 0-10 minutes
Evaporation
- Evaporation current (rod): 0-90 A
- Outgas current: 0-50 A
- Carbon source: 3.2 mm rods or carbon cord
