Equipment: UFO System
Technique: Physical Vapor Deposition
Contact person (Technische Universität Dresden): Hans Kleemann (hans.kleemann1@tu-dresden.de)
Description: Fabrication of OLED/OSC/ OTFT in UHV
Specifications:
- Sample size 1”x1”
- Mask system
- Standard perovskite materials and organic materials
- Up to 30 organic materials + 3 metals, heatable substrate
- System in clean-room with wet-bench
- In-situ characterization possible
