Physical vapor deposition: UFO System

Physical vapor deposition: UFO System
Transnational Access Activity/Installation
TA3. Prototype fabrication • TA3.5. Vacuum assisted deposition

Equipment: UFO System
Technique: Physical Vapor Deposition
Contact person (Technische Universität Dresden): Hans Kleemann (hans.kleemann1@tu-dresden.de)

Description: Fabrication of OLED/OSC/ OTFT in UHV


  • Sample size 1”x1”
  • Mask system
  • Standard perovskite materials and organic materials
  • Up to 30 organic materials + 3 metals, heatable substrate
  • System in clean-room with wet-bench
  • In-situ characterization possible