Equipment: UFO System
Technique: Physical Vapor Deposition
Acquisition year: 2003
Responsible: Hans Kleemann /
Description: Fabrication of OLED/OSC/ OTFT in UHV
Specifications:
- sample size 1”x1”
- Mask system
- Standard perovskite materials and organic materials
- Up to 30 organic materials + 3 metals, heatable substrate
- System in clean-room with wet-bench
- insitu characterization possible
