Benchtop UV-Ozone Cleaner: Novascan Technologies PSD-UV4

Benchtop UV-Ozone Cleaner: Novascan Technologies PSD-UV4

Equipment: Benchtop UV-Ozone Cleaner – Novascan Technologies/ PSD-UV4
Technique: UV-Ozone surface treatment
Contact person (UNINOVA): Pedro Barquinha (pmcb@fct.unl.pt), Ana Rovisco (a.rovisco@fct.unl.pt)
Responsible: Emanuel Carlos (e.carlos@fct.unl.pt)

Description: The PSD-UV series is designed for applications in electronic, semiconductor, optics and scientific industries. A mercury vapour lamp generates ultraviolet light (UV) and ozone resulting in the atomic cleaning of silicon, silicon nitride, glass, metals, ceramics and other materials. It can also be used for UV curing, UV patterning, sharpening atomic force microscope probes, ozone etching and more.


  • System Lamp: 4”x4”;
  • Size Sample:~4”;
  • Height System: 41lbs;
  • Weight System Footprint: 12L x 15.5W x 10.5H”;
  • Remove organic contaminants;
  • UV lamp generates UV light at both 185 nm and 254 nm;
  • Produces ozone and provides molecular excitation;
  • Operates at atmospheric pressure with ambient air or oxygen;
  • Multiple gas ports for the introduction of gases;
  • Sample stage with adjustable sample to lamp distance;
  • Safety switched to prevent user exposure to UV light;
  • Simple operation and compact footprint;
  • First rate technical support and customer service.

Link for additional information: https://www.novascan.com/products/uv_ozone_cleaners_silicon_glass_wafers.php