Equipment: Dektak XT
Technique: Film thicknesses and profiling of surfaces
Description:
The DektakXT, equipped with a unique direct-drive scan stage, accelerates measurement scan times by 40% while maintaining top-tier performance. Bruker’s Vision64 software enhances this with 64-bit parallel processing for faster loading and analysis. The DektakXT’s single-arch structure reduces environmental noise impact, while its upgraded electronics minimize temperature variations and noise, enabling measurements of <10nm step heights. Its intuitive interface and customizable automation facilitate efficient data collection and analysis. The self-aligning stylus assembly allows easy and reliable stylus changes, and automated multi-site measurement routines ensure precise thin film thickness verification, improving yields and saving time and money. The profilometer is designed to measure film thicknesses and profiling of surfaces in the >50 nm- and μm-range. Up to date existing probe needle has a cone diameter of 12.5μm. Sample stage dimensions are 4×4 inches. In order for the system to sense even lower thicknesses and soft, easily scratchable materials, an update is expected to take place next year.
Specifications:
The DektakXT profilometer by Bruker is designed to measure film thicknesses and profiling of surfaces in the >50 nm- and μm-range. Up to date to probe needle has a cone diameter of 12.5μm. Sample stage dimensions are 4×4 inches. So far the system does not have the update add-on to sense lower thicknesses and soft, easily scratchable materials.