Equipment: Spray pyrolysis tool for deposition of metal oxide films and perovskites
Technique & Description:This tool has been developed with the company EVGroup and enables deposition of metal oxide films and high-work function perovskites on substrates up to 200 mm wafer size. Specific precursor solutions are sprayed on the heated substrates (up to 450°C) to deposit the metal oxide films.
Specifications:
- Sample size up to 200 mm wafer size
- Deposition of SnO2, ZnO, and CuO films
- Other materials: to be discussed
- Film thickness rangy typically 50 nm – 250 nm
- Deposition temperature up to 600°C