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Spray pyrolysis tool for deposition of metal oxide films and perovskites

Spray pyrolysis tool for deposition of metal oxide films and perovskites
Transnational Access Activity/Installation
TA2. Material synthesis and ink formulation

Equipment: Spray pyrolysis tool for deposition of metal oxide films and perovskites

Technique & Description:This tool has been developed with the company EVGroup and enables deposition of metal oxide films and high-work function perovskites on substrates up to 200 mm wafer size. Specific precursor solutions are sprayed on the heated substrates (up to 450°C) to deposit the metal oxide films.

Specifications:

  • Sample size up to 200 mm wafer size
  • Deposition of SnO2, ZnO, and CuO films
  • Other materials: to be discussed
  • Film thickness rangy typically 50 nm – 250 nm
  • Deposition temperature up to 600°C