Equipment: Analysis of the thermal properties of metal, ceramic or organic thin films
Technique: Netzsch, PicoTR
Description:
Determination of the thermal diffusivity and thermal effusivity of single or multilayer systems in a range of 10 nm until 900 nm (depending on the material). Thermal conductivity and interfacial thermal resistance of layers can be evaluated from the measurement results.
Specifications:
- Pump Beam (1550 nm): ∅ 45 µm – high power (Eavg = 25 mW)
- Probe Beam (775 nm): ∅ 25 µm – low power
- Resolution: 1 ps (observation time 50 ns)
- Temperature: RT up to 500°C
- Atmosphere: N2 and Ar
- Two measurement modes
- Front heating/Front Detection
- Rear heating/Front Detection, (substrate = transparent (1550 nm))
- Sample requirements:
- X = 20 mm (practicable 10 mm)
- Y = 20 mm (practicable 10 mm)
- Z < 20 mm (practicable 5 – 2.5 mm)
- Non metals – reflection coating on the top
- Mo, Al, Pt (thickness: ~100 nm)
- Surface roughness < 15 nm (rms)