0
Wishlist

Spectroscopy ellipsometer: EP4

Equipment: Ellipsometer EP4
Technique:  Ellipsometry
Contact person (Technische Universität Dresden): Ali Shaygan Nia (ali.shaygan_nia@tu-dresden.de), Hans Kleemann (hans.kleemann1@tu-dresden.de)
Responsible: Christian Hänisch (christian.haenisch@tu-dresden.de)

Description: Optical method to determine n&k values. Measurement ideally on standard substrates (silicon substrates)

Specifications: 

  • 360-1000nm
  • angles from 40 to 90deg
  • sample stage for xy-movement + 360° rotation (mapping option in software)
  • software package for data analysis
  • standards available for calibration