Ellipsometer EP4

Equipment: Ellipsometer EP4
Technique:  Ellipsometry to determine n&k
Acquisition year: 2015
Responsible: Christian Hänisch/

Description: Optical method to determine n&k values. Measurement ideally on standard substrates (silicon substrates)


  • 360-1000nm
  • angles from 40 to 90deg
  • sample stage for xy-movement + 360° rotation (mapping option in software)
  • software package for data analysis
  • standards available for calibration