XPS/UPS: Kratos Axis Supra

Equipment: Kratos Axis Supra
Technique: X-ray and ultraviolet photoelectron spectroscopy (XPS/UPS)
Contact person (UNINOVA): Pedro Barquinha (pmcb@fct.unl.pt), Ana Rovisco (a.rovisco@fct.unl.pt)
Responsible: Jonas Deuermeier (j.deuermeier@fct.unl.pt)

Description: X-ray photoelectron spectroscopy is a surface analysis tool for chemical and electronic characterization of materials with an information depth of 1-9 nm. Its distinguishing feature is the possibility to measure the oxidation state of elements. In addition, surface potentials can be studied, including the work function by ultraviolet photoelectron spectroscopy.

Specifications: The Kratos AXIS Supra is based on the proven AXIS technology comprising: magnetic and electrostatic transfer lenses; co-axial electron-only charge neutralisation; spherical mirror and mispherical electron energy analysers. Kratos developed innovations such as the delay-line detector for spectroscopy and imaging modes and high energy, motorised, X-ray excitation sources ensure the AXIS Supra is capable of performing in the most demanding research and development environments. With market leading performance in both imaging and spectroscopy modes the AXIS Supra combines the highest level of automated sample handling with flexibility to incorporate complementary analytical techniques in the analysis chamber.

Detailed specifications:

  • Excellent compromise between energy resolution and sensitivity:
    • 0.44 eV at 200 kcps (XPS)
    • 0.60 eV at 2 Mcps (XPS)
    • 0.01 eV at 1 kcps (UPS)
  • Lateral resolution for spectroscopy: 15 µm
  • Imaging capability with lateral resolution of 3 µm and infinite size (by image stitching)
  • Rapid “snapshot” spectroscopy
  • Angle-resolved measurement and azimuthal rotation
  • Pressure in analysis chamber down to 5e-10 Torr
  • Sample holder size 9 x 3 cm
  • 165 mm mean radius hemispherical and spherical mirror analyzer
  • Delay-line detector
  • Magnetic immersion lense
  • Electron-only charge neutralisation
  • Monochromatic Al source (1486.6 eV) and monochromatic Ag source (2984.3 eV)
  • Argon cluster sputter gun (up to 2000 atoms)
  • Heating and cooling in load-lock and analysis chamber (-120°C to 800°C)
  • Helium discharge lamp for UPS (He I: 21.22 eV, He II: 40.8 eV)
  • Ion scattering spectrometry (ISS)
  • Sample transfer chamber for transport of air-sensitive samples

Link for additional information: