Equipment: Lesker System
Technique: Physical Vapor Deposition
Contact person (Technische Universität Dresden): Hans Kleemann (hans.kleemann1@tu-dresden.de)
Description: Fabrication of OLED/ Organic Solar Cells in UHV on large area substrates
Specifications:
- 3 Lesker tools for 15cm x 15cm substrates → operated by experienced technicians
- Mask and Wedge-System to build hundreds of OLEDs, Solar cells, or transistors in one run ensuring high reproducibility and precise control over thicknesses and blending ratios
- Encapsulation robot and thin-film encapsulation process available
- Up to 20 organic materials + 3 metals, heatable substrate
- System in clean-room with wet-bench
- Automated measurement setup