Equipment: Lesker System
Technique: Physical Vapor Deposition
Acquisition year: 2006
Responsible: Hans Kleemann,
Description: Fabrication of OLED/ Organic Solar Cells in UHV on large area substrates
- Specifications:
3 Lesker tools for 15cm x 15cm substrates → operated by experienced technicians - Mask and Wedge-System to build hundreds of OLEDs, Solar cells, or transistors in one run ensuring high reproducibility and precise control over thicknesses and blending ratios
- Encapsulation robot and thin-film encapsulation process available
- Up to 20 organic materials + 3 metals, heatable substrate
- System in clean-room with wet-bench
- Automated measurement setup
