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Physical vapor deposition: Lesker System

Physical vapor deposition: Lesker System
Transnational Access Activity/Installation
TA3. Prototype fabrication • TA3.5. Vacuum assisted deposition

Equipment: Lesker System
Technique:
Physical Vapor Deposition
Contact person (Technische Universität Dresden): Hans Kleemann (hans.kleemann1@tu-dresden.de)

Description: Fabrication of OLED/ Organic Solar Cells in UHV on large area substrates

Specifications:

  • 3 Lesker tools for 15cm x 15cm substrates → operated by experienced technicians
  • Mask and Wedge-System to build hundreds of OLEDs, Solar cells, or transistors in one run ensuring high reproducibility and precise control over thicknesses and blending ratios
  • Encapsulation robot and thin-film encapsulation process available
  • Up to 20 organic materials + 3 metals, heatable substrate
  • System in clean-room with wet-bench
  • Automated measurement setup