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Atomic force microscope: Park XE7

Atomic force microscope: Park XE7

Equipment: Park XE7 AFM platform including Scanning Kelvin Probe Microscopy (SKPM), Dynamic Contact EFM (DC-EFM) and Piezoresponse Force Microscopy (PFM) modes
Technique: Atomic Force Microscopy (AFM)
Contact person (Hellenic Mediterranean University): Konstantinos Rogdakis (krogdakis@hmu.gr)
Responsible: Dimitris Tsikritzis (dtsikritzis@hmu.gr)

Description: Atomic Force Microscope system for small and medium size samples, consisting of completely decoupled XY & Z scanners using flexure guided scan system for all three axes, closed/open-loop scan, XY flexure scanner with zero background curvature, XE AFM head, direct on-axis optics, high resolution digital CCD camera with digital zoom, motorized Z stage, manual focus stage, precision manual XY sample stage, control electronics, computer, software and cantilevers.

Specifications: 

  • XY scanner with closed-loop feedback control
    • Single module parallel-kinematics flexure stage
    • Scan range: 50 × 50 μm
    • Resolution: < 0.6 nm (closed-loop), < 0.01 nm (open-loop)
  • Z scanner with closed-loop feedback control 
    • Guided flexure stage
    • Scan range: 12 μm
    • Noise level: 0.03 nm (typical) / 0.05 nm (maximum)
  • Enhanced EFM, Scanning Kelvin Probe Microscopy (SKPM), Dynamic Contact EFM (DC-EFM) and Piezoresponse Force Microscopy (PFM) modes.
  • Supports standard AFM/SPM modes including True Non-contact mode, dynamic contact mode, contact mode, LFM (lateral force microscopy), F/D spectroscopy, and phase imaging with no need of additional software/hardware option.
  • Performs MFM, EFM, FMM, and Nanoindentation