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J.A.Woollam Inc./Ellipsometer VASE

Country/Institute
Austria • Joanneum Research (JOR)

Equipment: J.A.Woollam Inc./Ellipsometer VASE
Technique: Variable Angle Spectroscopic Ellipsometry
Acquisition year: 2000
Responsible: Georg Jakopic /  

Description: Spectroscopic ellipsometry is an optical technique using the relative phase and amplitude changes in polarized light reflected from a surface or a thin film to characterize optical sample properties like refractive index, absorption coefficient and film thickness. The measured data are used to establish a model of the sample containing dispersion relations to describe the sample properties.

Specifications: The VASE® is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range – from 240 to 1700nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including:

  • Reflection and Transmission Ellipsometry;
  • Generalized Ellipsometry (Anisotropy, Retardance, Birefringence);
  • Reflectance (R) and Transmittance (T) intensity;
  • Cross-polarized R/T;
  • Depolarization;
  • Scatterometry;
  • Mueller-matrix.

Additional microspot optics for reduction of measurement spot diameter from 3mm to 200µm
Sample maximum dimension ~ 10×10 cm, minimum dimension 1×1 cm

Ellipsometer ConfigurationRAE with AutoRetarder
Wavelength Range240-1700 nm (UV / VIS / NIR)
Number of WavelengthsUser defined before measurement
Angles of Incidence15°-90°
Data Acquisition Rate0.1 to 3 seconds per wavelength
Max substrate thickness20mm

Link for additional information (if any): 
manufacturer website: VASE Ellipsometer – J.A. Woollam (jawoollam.com)