Equipment: J.A.Woollam Inc./Ellipsometer VASE
Technique: Variable Angle Spectroscopic Ellipsometry
Contact person (Joanneum Research): Barbara Stadlober (barbara.stadlober@joanneum.at)
Responsible: Georg Jakopic (georg.jakopic@joanneum.at)
Description: Spectroscopic ellipsometry is an optical technique using the relative phase and amplitude changes in polarized light reflected from a surface or a thin film to characterize optical sample properties like refractive index, absorption coefficient and film thickness. The measured data are used to establish a model of the sample containing dispersion relations to describe the sample properties.
Specifications: The VASE® is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range – from 240 to 1700nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including:
- Reflection and Transmission Ellipsometry;
- Generalized Ellipsometry (Anisotropy, Retardance, Birefringence);
- Reflectance (R) and Transmittance (T) intensity;
- Cross-polarized R/T;
- Depolarization;
- Scatterometry;
- Mueller-matrix.
Additional microspot optics for reduction of measurement spot diameter from 3mm to 200µm
Sample maximum dimension ~ 10×10 cm, minimum dimension 1×1 cm
| Ellipsometer Configuration | RAE with AutoRetarder | ||
| Wavelength Range | 240-1700 nm (UV / VIS / NIR) | ||
| Number of Wavelengths | User defined before measurement | ||
| Angles of Incidence | 15°-90° | ||
| Data Acquisition Rate | 0.1 to 3 seconds per wavelength | ||
| Max substrate thickness | 20mm |
Link for additional information: VASE Ellipsometer – J.A. Woollam (jawoollam.com)
