Equipment: Agilent 4155C + Cascade Microtech M150
Technique: Semiconductor parameter analyser
Contact person (UNINOVA): Pedro Barquinha (pmcb@fct.unl.pt), Ana Rovisco (a.rovisco@fct.unl.pt)
Responsible: Jorge Martins (jds.martins@campus.fct.unl.pt)
Description: Setup for I-V and time dependent measurements in substrates up to 6”, from room temperature to 300 °C, with dark box enclosure.
Specifications:
- 4x Source-Monitor Units (SMUs), 2x Voltage-Monitor Units (VMUs) and 2x Voltage-Source Units (VSUs). Measurement resolution of 10 fA. Range up to 100 V / 0.1 A
- Sweep, constant and sampling mode I and V stimulus
- 4 manual micromanipulators with triaxial cabling (sub-pA measurement capability)
- Thermal chuck for measurements between RT and 300 °C, with controllable ramps
- Dark box enclosure for light and RF shielding
- Keysight Desktop EasyExpert software for data acquisition and analysis
- Can be connected to external equipment (e.g. oscilloscope and wave generator)
- Time dependent measuring
- Substrates up to 2”
Link for additional information:
https://www.cenimat.fct.unl.pt/lab-facilities/electrical-characterization-lab/agilent-4155c-semiconductor-parameter-analyzer-cascade-microtech-m150-manual-p
https://www.keysight.com/zz/en/product/4155C/semiconductor-parameter-analyzer.html
https://micro.fel.cvut.cz/wp-content/uploads/2019/03/Cascade-Microtech-M150.pdf
