Semiconductor parameter analyser: Agilent 4155C + Cascade Microtech M150

Semiconductor parameter analyser: Agilent 4155C + Cascade Microtech M150

Equipment: Agilent 4155C + Cascade Microtech M150
Technique: Semiconductor parameter analyser
Contact person (UNINOVA): Pedro Barquinha (pmcb@fct.unl.pt), Ana Rovisco (a.rovisco@fct.unl.pt)
Responsible: Jorge Martins (jds.martins@campus.fct.unl.pt)

Description: Setup for I-V and time dependent measurements in substrates up to 6”, from room temperature to 300 °C, with dark box enclosure.


  • 4x Source-Monitor Units (SMUs), 2x Voltage-Monitor Units (VMUs) and 2x Voltage-Source Units (VSUs). Measurement resolution of 10 fA. Range up to 100 V / 0.1 A
  • Sweep, constant and sampling mode I and V stimulus
  • 4 manual micromanipulators with triaxial cabling (sub-pA measurement capability)
  • Thermal chuck for measurements between RT and 300 °C, with controllable ramps
  • Dark box enclosure for light and RF shielding
  • Keysight Desktop EasyExpert software for data acquisition and analysis
  • Can be connected to external equipment (e.g. oscilloscope and wave generator)
  • Time dependent measuring
  • Substrates up to 2”

Link for additional information: