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Agilent 4155C + Cascade Microtech M150

Agilent 4155C + Cascade Microtech M150

Equipment: Agilent 4155C + Cascade Microtech M150
Technique: Semiconductor parameter analyser
Acquisition year: 2006
Responsible: Jorge Martins /

Description: Setup for I-V and time dependent measurements in substrates up to 6”, from room temperature to 300 °C, with dark box enclosure.

Specifications: 

  • 4x Source-Monitor Units (SMUs), 2x Voltage-Monitor Units (VMUs) and 2x Voltage-Source Units (VSUs). Measurement resolution of 10 fA. Range up to 100 V / 0.1 A
  • Sweep, constant and sampling mode I and V stimulus
  • 4 manual micromanipulators with triaxial cabling (sub-pA measurement capability)
  • Thermal chuck for measurements between RT and 300 °C, with controllable ramps
  • Dark box enclosure for light and RF shielding
  • Keysight Desktop EasyExpert software for data acquisition and analysis
  • Can be connected to external equipment (e.g. oscilloscope and wave generator)
  • Time dependent measuring
  • Substrates up to 2”

Link for additional information (if any): 
https://www.cenimat.fct.unl.pt/lab-facilities/electrical-characterization-lab/agilent-4155c-semiconductor-parameter-analyzer-cascade-microtech-m150-manual-p
https://www.keysight.com/zz/en/product/4155C/semiconductor-parameter-analyzer.html
https://micro.fel.cvut.cz/wp-content/uploads/2019/03/Cascade-Microtech-M150.pdf