Scanning electron microscope: Hitachi SEM Regulus8220

Scanning electron microscope: Hitachi SEM Regulus8220

Equipment: Ultra-high Resolution Scanning Electron Microscope Hitachi SEM Regulus8220
Technique:  Scanning Electron Microscopy (SEM)
Contact person (UNINOVA): Pedro Barquinha (pmcb@fct.unl.pt), Ana Rovisco (a.rovisco@fct.unl.pt)
Responsible: Daniela Gomes (daniela.gomes@fct.unl.pt)

Description: High resolution field emission SEM microscope operating at up to 30 kV equipped with energy dispersive X-ray spectroscopy (EDS) detector, and reaching resolutions down to 0.7 nm. 

Specifications: Cold field emission (CFE) gun optimized for low-voltage, high-resolution imaging with low aberration: 0.7 nm/1 kV and 0.6 nm/15 kV, and maximum magnification of 2 million times.
Acceleration voltages from 0.5 to 30 kV.
Maximum sample height: ~1 cm, and diameter ~5 cm.

Link for additional information: https://www.hitachi-hightech.com/global/science/products/microscopes/electron-microscope/fe-sem/regulus.html