Hitachi SEM Regulus8220

Equipment: Hitachi SEM Regulus8220
Technique:  Ultra-high Resolution Scanning Electron Microscope Regulus Series (FE- SEM)
Acquisition year: 2021
Responsible: Daniela Gomes /

Description: High resolution field emission SEM microscope operating at up to 30 kV equipped with energy dispersive X-ray spectroscopy (EDS) detector, and reaching resolutions down to 0.7 nm. 

Specifications: Cold field emission (CFE) gun optimized for low-voltage, high-resolution imaging with low aberration: 0.7 nm/1 kV and 0.6 nm/15 kV, and maximum magnification of 2 million times.
Acceleration voltages from 0.5 to 30 kV.
Maximum sample height: ~1 cm, and diameter ~5 cm.

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