Semiconductor parameter analyser: Keithley 4200 SCS + Janis ST-500

Semiconductor parameter analyser: Keithley 4200 SCS + Janis ST-500

Equipment: Keithley 4200 SCS + Janis ST-500
Technique: Semiconductor parameter analyser
Contact person (UNINOVA): Pedro Barquinha (pmcb@fct.unl.pt), Ana Rovisco (a.rovisco@fct.unl.pt)
Responsible: Asal Kiazadeh (a.kiazadeh@fct.unl.pt)

Description: Setup for I-V, C-V time dependent and pulsed-IV measurements in substrates up to 4” (2” max recommended), on cryogenic probe station with optical arm for light dependent measurements.


  • 4x Source-Monitor Units (SMUs): 2x mid-power (100 mA to 100 fA, 200 V to 1 μV) and 2x with preamp for 0.1 fA resolution. Range up to 200 V / 0.1 A
  • Sweep, constant and sampling mode I and V stimulus
  • Multi Frequency Capacitance Measurement Unit (1 kHz to 10 MHz, 30 V built-in DC bias and 200 V DC bias with SMU, CV, C-f and C-t measurement)
  • Ultra-fast pulse measurement unit (40 V, 200 pA measurement resolution, 200 MSa/s simultaneous I and V measure)
  • Automatic switching between all measurement modes (no cabling change needed)
  • 4 manual micromanipulators with triaxial and kelvin cabling (sub-pA measurement capability)
  • 1 optical arm for connection to optical fiber to perform optical dependent measurements (possibility to directly connect a wide range of high-power LEDs from Thorlabs also available in the lab)
  • Cryogenic operation from 90 to 550 K, with temperature control via Lakeshore 336
  • Turbomolecular pump enabling 10-5 mbar chamber pressure

Link for additional information: