Semiconductor parameter analyser: Keysight B1500A + Cascade Microtech EPS 150

Semiconductor parameter analyser: Keysight B1500A + Cascade Microtech EPS 150

Equipment: Keysight B1500A + Cascade Microtech EPS 150
Technique: Semiconductor parameter analyser
Contact person (UNINOVA): Pedro Barquinha (pmcb@fct.unl.pt), Ana Rovisco (a.rovisco@fct.unl.pt)
Responsible:  Jorge Martins (jds.martins@campus.fct.unl.pt)

Description: Semiconductor parameter analyser for device/circuit characterization, supporting I-V, C-V, and time dependent measurements, connected to a probe station inside a dark box.


  • Dark box enclosure for light and RF shielding
  • Multi Frequency Capacitance Measurement Unit: 1 kHz to 5 MHz (1 kHz to 5 MHz, 25 V built-in DC bias and 100 V DC bias with SMU and Unify Unit, Up to 250 mVrms signal level, 1001 sweep points in CV, C-f and C-t measurement)
  • 4x Source-Monitor Units (SMUs): 2x mid-power (measurement resolution 10 fA / 0.5 μV, source resolution 50 fA / 25 µV) and 2x high-resolution (measurement resolution 1 fA / 0.5 μV, source resolution 5 fA / 25 µV). Range up to 100 V / 0.1 A
  • Can be connected to external equipment (e.g. oscilloscope and wave generator)
  • Time dependent measuring (sampling interval down to 0.1 ms)
  • 6 manual micromanipulators with triaxial cabling (sub-pA measurement capability)
  • Substrates up to 6”
  • Keysight Desktop EasyExpert software for data acquisition and analysis

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