Equipment: Keysight B1500A + Cascade Microtech EPS 150
Technique: Semiconductor parameter analyser
Contact person (UNINOVA): Pedro Barquinha (pmcb@fct.unl.pt), Ana Rovisco (a.rovisco@fct.unl.pt)
Responsible: Jorge Martins (jds.martins@campus.fct.unl.pt)
Description: Semiconductor parameter analyser for device/circuit characterization, supporting I-V, C-V, and time dependent measurements, connected to a probe station inside a dark box.
Specifications:
- Dark box enclosure for light and RF shielding
- Multi Frequency Capacitance Measurement Unit: 1 kHz to 5 MHz (1 kHz to 5 MHz, 25 V built-in DC bias and 100 V DC bias with SMU and Unify Unit, Up to 250 mVrms signal level, 1001 sweep points in CV, C-f and C-t measurement)
- 4x Source-Monitor Units (SMUs): 2x mid-power (measurement resolution 10 fA / 0.5 μV, source resolution 50 fA / 25 µV) and 2x high-resolution (measurement resolution 1 fA / 0.5 μV, source resolution 5 fA / 25 µV). Range up to 100 V / 0.1 A
- Can be connected to external equipment (e.g. oscilloscope and wave generator)
- Time dependent measuring (sampling interval down to 0.1 ms)
- 6 manual micromanipulators with triaxial cabling (sub-pA measurement capability)
- Substrates up to 6”
- Keysight Desktop EasyExpert software for data acquisition and analysis
Link for additional information:
https://www.cenimat.fct.unl.pt/lab-facilities/electrical-characterization-lab/keysight-b1500a-semiconductor-parameter-analyzer-cascade-microtech-eps-150-man
https://www.keysight.com/zz/en/products/parameter-device-analyzers-curve-tracer/precision-current-voltage-analyzers/b1500a-semiconductor-device-parameter-analyzer.html
https://www.formfactor.com/product/probe-systems/150-mm-systems/mps150/
