Scanning electron microscope: Hitachi SU 8230

Scanning electron microscope: Hitachi SU 8230

Equipment: Ultra-high Resolution Scanning Electron Microscope Hitachi SU 8230
Technique: Scanning Electron Microscope (SEM)
Contact person (Warsaw University of Technology): Jakub Krzemiński (Jakub.krzeminski@pw.edu.pl)
Sandra Lepak-Kuc (sandra.kuc@pw.edu)

Description: Hitachi SU 8230 is a Field Emission Gun Scanning Electron Microscope (FEGSEM) capable of 1.1 nm resolution at 1.5 mm working distance at 1.0 kV landing voltage, and 0.8 nm resolution at 15 kV at 4 .0 mm working distance. The Cold Field Emission (CFE) gun: complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability. The source brightness (A / cm2/sr) exceeds that of any prior Hitachi SEM.


  • Secondary Electron Resolution: 0.6 nm (Vacc: 15 kV); 0.7 nm (Landing voltage: 1 kV)- Observation in beam deceleration mode.
  • Accelerating voltage: 0.5~30 kV.
  • Magnification: 20~2,000,000 × (Magnification specified based on a display size of 127 mm × 95 mm).
  • 5-axis motor drive for stage control.

Link for additional information: http://cezamat.eu/infrastruktura/badawcza/sem/