Electron beam lithography (EBL) is a method for creating ultra-fine, nanometer-sized structures in modern nanotechnology. It is an important instrument in semiconductor technology, used...
XPS is a surface sensitive method for chemical analysis widely used for e. g. thin films, molecular layers or chemical surface modification. The sample...
The 3D laser scanning microscope of the VK-X1050 model series uses two different measurement principles combined in one device; depending on the application, a...
Spectroscopic ellipsometry is an optical technique using the relative phase and amplitude changes in polarized light reflected from a surface or a thin film...
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