TA4.1. Device metrology & characterization

The LSM 700 is a light microscopy system that uses laser light in a confocal beam path to capture defined optical sections of the...

Profilometry is a fast and direct method for measuring step heights, surface roughness, etching depths and planarity.

An atomic force microscope is a type of microscope that maps sample properties by tracking the behaviour of a nanometre sized probe as it...

The Lambda 950 is a UV/VIS/NIR high-performance double-beam dual monochromator spectrometer with microcomputer electronics.

Digital storage oscilloscope is an electronic device consisting of numerous software and electronic hardware modules that allow to capture, process, view, and store electrical signals

The Reference 600™ is a Potentiostat/Galvanostat/ZRA equipped with acquisition and analysis software for physical electrochemistry and electrochemical impedance experiments.

Semiconductor parameter analyser for device/circuit characterization, supporting I-V, C-V, and time dependent measurements.

Keysight 33500B is a Waveform Generator. It has two channels and allows for arbitrary waveform generation.  

Setup for I-V, C-V time dependent and pulsed-IV measurements in substrates up to 4” (2” max recommended), on cryogenic probe station with optical arm...

Setup for I-V and time dependent measurements in substrates up to 2”, at room temperature, with dark box enclosure.

Setup for I-V and time dependent measurements in substrates up to 6”, from room temperature to 300 °C, with dark box enclosure.

Zeiss Auriga combines a high-resolution SEM for imaging materials and devices at nanoscale with a FIB column enabling precise milling.